A possibility to increase throughput, while maintaining accuracy is to use parallel processing, i.e. movement and positioning in parallel within section, calibration, assembling, scanning, etc. To meet the design requirements of high accuracy while improving performance, a new design approach is necessary, especially if vacuum operation is considered, which will be required for
the next generation no lithography machines. A lot of disturbance sources can be eliminated by integrating the cascaded long-and short-stroke actuator into one actuator system. Since most long-stroke movements are in a plane, this can be done by a contactless planar actuator. The topology proposed and tested in this paper provides long-stroke contact less energy transfer (CET) in a plane with only small changes in power transfer capability. 2.DESCRIPTION ACTUATOR Actuator is a mechanical device used for moving or controlling a mechanism or system. It converts electrical signals into motion. Here we are using a linear actuator; it converts electrical signals into linear motion i.e. the movement is linear in manner along a plane.
CET TOPOLOGY
The design of the primary and secondary coil is optimized to get a coupling that is as constant as possible for a sufficiently large area. This area should be large enough to allow the secondary coil to move from one primary
References: * Jeroen de Boeij, Student Member, IEEE * Conference papers * journals