BY ION BEAM ENHANCED DEPOSITION
1. COVER SHEET (see attached)
2. IDENTIFICATION & SIGNIFICANCE OF THE OPPORTUNITY
The objective of this proposal is to demonstrate the feasibility of producing super adherent protective coatings at low processing temperatures using energetic ion beams in conjunction with conventional deposition techniques. This process, coined Ion Beam Enhanced Deposition (IBED), is depicted in Figure 1 and promises a new generation of exotic coatings with superior adhesion, near theoretical densities, very high hardness, and, at the same time, capable of being deposited at low temperature. T he effect of the ion beam (e.g., N) is to initially “intermix” the deposited atoms (e.g., Ti) with the substrate for superior adhesion as well as to provide energy to the grown layer for effectively “high temperature” processing at low substrate temperature res. Highly adherent coatings of “TiN” with low friction (Figure 2) have already been demonstrated by Kant et al (l) at Naval Research Laboratory by N-bombardment of deposited Ti. This proposal is to extend the range of protective coatings produced by IBED to include HfN, AI203 and to characterize such films for mechanical and chemical properties as well as micro structural analyses. Evaluation of mechanical properties will include adhesion tests and wear tests. Initially laboratory pin-on-disc tests will be used for screening purposes with in-situ component tests planned for later. Micro structural analyses deemed necessary include 1) sputter Auger electron spectroscopy for compositional analysis, 2) sputter ESCA for composition and chemical bonding information,
3) Glancing x-ray analysis for lattice structure, 4) ion backscattering for nondestructive composition vs. depth information, and 5) SEM and TEM for grain structure and lattice microstructure information. Hard, extremely adherent hard coatings synthesized by the ion beam enhanced deposition technique will be of
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