Clean Room Rules and Regulatio
1 PURPOSE 1.1 This procedure is to provide the general accepted Cleanroom practices for N2FC Cleanroom 1 and Cleanroom 2 at School Electrical and Electronic Engineering, Nanyang Technological University.
SCOPE 2.1 This procedure applies to all personnel entering N2FC Cleanrooms. When in doubt, please consult the staff on duty.
APPLICABLE DOCUMENTS 3.1 3.2 Federal Standard 209E IES-RP-CC018.2 Cleanroom Housekeeping - Operating and monitoring proc
TERMS AND DEFINITIONS 4.1 Cleanroom An enclosed room in which the room conditioning especially the concentration of airborne particles is controlled to meet a specified cleanliness class for wafer fabrication. Changing Room Cleanroom adjacent to the main Cleanroom from where all personnel dress and undress Cleanroom garment before entering the Cleanroom. Sub-Fab Supporting Cleanroom operation and is located directly below the raised floor of the main Cleanroom, where most of the supporting equipment were located and supporting facilities for processing equipment are laid. Buffer Room Enclosed partitions in the Grey room and Sub-Fab. Viewing Area Enclose partitions prior to Control room for visitors. This is not classified as Cleanroom.
Control Room Enclose room prior to changing room for housing the remote monitoring facilities. This is not classified as Cleanroom.
POLICY 5.1 The Cleanroom is a restricted area. Access to the Cleanroom is limited to authorize personnel only. All personnel, including visitors, entering the Cleanroom must comply with the rules and regulations as laid out in this procedure. For safety reasons, no one is allowed to stay or work in the N2FC without the presence of the Laboratory staff.
PROCEDURE 6.1 General Cleanroom concepts The floor is considered to be the dirtiest part. The bench top and process equipment are to be maintained as the cleanest part. Human factors are considered the