Nano Technology

Introduction to nanotechnology
Henrik Bruus
MIC – Department of Micro and Nanotechnology Technical University of Denmark

Lyngby, spring 2004

Preface
In the spring 2002 MIC launched a new fourth semester course at the Technical University of Denmark (course no. 33320, 10 ECTS) to provide a general and broad introduction to the multi-disciplinary field of nanotechnology. The number of students attending the course has grown steadily from 24 in 2002, to 35 the following year and now more than 50 in 2004. Based on the feed-back from the students I have changed part of the course and expanded the lecture notes. The aim of the course remains the same. It is intended for students who have completed three semesters in any engineering or science study programme at college level. During the course the students will be introduced to many fascinating phenomena on the nanometer scale, and they will hopefully acquire basic knowledge of the theoretical concepts and experimental techniques behind the recent vastly improved ability to observe, fabricate and manipulate individual structures on the nanometer scale. The first part of the course, which is covered by these lecture notes, is an introduction to the top-down approach of microelectronics and micromechanics. Here selectred topics like the AFM and quantum transport are studied in some detail. The second part has a much broader focus. Here the aim is to give the students an overview of the on-going merge of the top-down approach with the bottom-up approach of chemistry/biochemistry; a development that is creating new and exciting cross-disciplinary research fields and technologies. Much of the material used in this part of the course is provided by guest lecturers

Henrik Bruus MIC – Department of Micro and Nanotechnology Technical University of Denmark 26 January 2004

PREFACE

Contents
1 Top-down micro and nanotechnology
1.1 Microfabrication and Moore’s law . .
1.2 Clean room facilities . . . . . . . . .... [continues]

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