Topics: Magnetic field, Semiconductor device fabrication, Shape memory alloy Pages: 19 (4760 words) Published: February 23, 2013
Page 1. INTRODUCTION 1.1 1.2 1.3 1.4 2. Aim Background Methodology Scope of Investigation 1 1 1 1 1 2 2 2 3 4 4 4 5 5 6 6 6 7 8 9 10 11 12 14 14 14 14 14 14 14 14 14 15 16

COMMERCIAL PRODUCTS OF MICRO-GRIPPERS 2.1 Availability of Current and Potential Market 2.1.1 NMG-Grippers 2.1.2 Shape Memory Micro Grippers 2.1.3 Zyvex Micro Grippers Application of Product 2.2.1 NMG-Grippers 2.2.2 Shape Memory Micro Gripper 2.3.3 Zyvex Micro Grippers



WORKING PRINCIPLES 3.1 Electrostatic Actuation 3.1.1 Parallel-Plate Capacitor 3.1.2 Comb Drive Piezoelectric Actuation Thermal Actuation Shape Memory Alloy (SMA) Magnetic Actuation Selection for Implementation

3.2 3.3 3.4 3.5 3.6 4.

DESIGN PROCESS 4.1 Design Constraints 4.1.1 Environmental Conditions 4.1.2 Applications 4.1.3 Fabrication Facility 4.1.4 Physical size and weight limitations 4.1.5 Costs 4.1.6 Speed Selection of Materials 4.2.1 Types of Materials 4.2.2 Material Properties 4.2.3 Selected Materials for Microgripper


CONTENTS (continued)
Page 5. FABRICATION PROCESS 5.1 5.2 5.3 5.4 6. Photolithography Dry Etching of Stencil Sputtering Etching remaining silicon 17 17 19 19 20 21 21 21 21 21

SAFETY PROCEDURE 6.1 6.2 6.3 Clean Room Causes of Accidents Prevention of Accidents



1.1 Purpose This report evaluates the different commercial products of micro grippers available in the current markets. It also touches on the different types of working principles. On top of that this report also covers the design and fabrication process. 1.2 Background Micro grippers are microelectromechanical system with micro actuators. Actuation is a process that converts energy, like electric or thermal, into mechanical motion .There are different types of micro grippers for different functions. The main purpose of a micro gripper is to grip things tightly in the form of micro. 1.3 Methodology Materials and information obtained were taken from the internet websites and reference books.


Scope of Investigation The scope of investigation covers the commercial products of micro grippers, working principles of electrostatic actuation of parallel-plate capacitor and comb drive, piezoelectric actuation, thermal actuation, shape memory alloy, selection for implementation. Design process, design constraints, selection of materials and fabrication process.



2.1 Availability of Current and Potential Markets The current market in the field of micro grippers is very competitive more intensive research is done to improve the quality and to reduce the size of the micro grippers. Not only that, the demand of microgrippers in minute chips is increasing rapidly as technology increases, the size of appliances and equipments are reducing. 2.1.1 NMG-Grippers The NMG-Grippers, by Klocke Nanotechnik, combines the precision of the normal gripper with the design of their own Nanorobotics product series. NMG-Gripper can be attached to the NMT tables with just a few screws and it is easily connected to the electronics by a special plug. This NMGGripper has a better of 1nm resolution than normal micro grippers which allows to have better gripping force of up to 150mN. This amount of gripping force is to avoid micro parts being snap out of the grippers. Not only is it small in size which occupies only 10mm of space, but it is also vacuum compatible. It will also save cost as it has low-voltage power consumption. Refer to Fig1.1, Fig1.2 and Fig1.3. The NMG grippers is the smallest and most precise positioning modules in which allows microassembly, interconnection technology, analysis and reliability testing with plenty degrees of freedom. The gripper tips shape can be designed to fit exactly to the micro part. So it is possible to move with the gripper directly over a surface, e.g. to put arrays of glass fibres into a hole plate. It is available through...
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